JPH0487635U - - Google Patents
Info
- Publication number
- JPH0487635U JPH0487635U JP13024890U JP13024890U JPH0487635U JP H0487635 U JPH0487635 U JP H0487635U JP 13024890 U JP13024890 U JP 13024890U JP 13024890 U JP13024890 U JP 13024890U JP H0487635 U JPH0487635 U JP H0487635U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- motor
- surface treatment
- reactor
- inverter device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004381 surface treatment Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024890U JPH0487635U (en]) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13024890U JPH0487635U (en]) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487635U true JPH0487635U (en]) | 1992-07-30 |
Family
ID=31877604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13024890U Pending JPH0487635U (en]) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487635U (en]) |
-
1990
- 1990-11-30 JP JP13024890U patent/JPH0487635U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0487635U (en]) | ||
| CN107320127A (zh) | 一种用于放射科具有摆动功能的人体承载设备 | |
| JPS6016538U (ja) | 半導体ウエハの片面処理装置 | |
| JPS6295712U (en]) | ||
| JPH0247044U (en]) | ||
| JPS63174443U (en]) | ||
| JPS62277284A (ja) | 無塵室用搬送ロボットによる搬送方法 | |
| CN212792190U (zh) | 一种传感器生产用吹尘设备 | |
| JPS6224238B2 (en]) | ||
| JPH01121930U (en]) | ||
| JPH0614473Y2 (ja) | 可搬式クリーンベンチ | |
| JPS63153529U (en]) | ||
| JPS6161016U (en]) | ||
| JPS6128585Y2 (en]) | ||
| JPH02108334U (en]) | ||
| JPS59103765U (ja) | 表面処理装置における被処理物の液切り装置 | |
| JPS62148398U (en]) | ||
| JPS6385664U (en]) | ||
| JPS63155629U (en]) | ||
| JPS6439632U (en]) | ||
| JPS61188354U (en]) | ||
| JPS6439894U (en]) | ||
| JPS604328U (ja) | 物品処理装置における物品載置台構造 | |
| JPS6283949A (ja) | ウエハ搬送装置 | |
| JPS6367243U (en]) |